Optical compensation devices, systems, and methods

ABSTRACT

Photolithographic apparatus, systems, and methods that make use of optical compensation devices are disclosed. In various embodiments, an imaging mask includes an optically transmissive substrate. A first patterned region is formed on the substrate, and a second patterned region is formed on the substrate that is proximate to the first patterned region, the first patterned region and the second patterned region each having a plurality of optically transmissive and optically attenuating regions formed on the mask. An optical compensation region is positioned proximate to at least one of the first patterned region and the second patterned region that is configured to change a phase of the illumination radiation incident on the at least one of the first patterned region and the second region by altering an optical property of the substrate.

RELATED APPLICATION

This application is a continuation of U.S. application Ser. No.11/749,624, filed May 16, 2007, which is incorporated herein byreference in its entirety.

TECHNICAL FIELD

The embodiments disclosed herein relate generally to photolithographicdevices and methods, including optical compensation features forphotolithographic masks used in sub-resolution photolithography.

BACKGROUND

The incorporation of increasing numbers of discrete devices intoprogressively smaller integrated circuits remains an important challengein the manufacture of Very Large Scale Integration (VLSI) structures.For example, the implementation of complementary metal-oxidesemiconductor (CMOS) technology into integrated circuits usuallyinvolves imparting a prescribed set of manufacturing attributes to theintegrated circuit, such as selected dopant concentrations, channellengths, interconnect dimensions, contact shapes, or other pertinentattributes, which collectively permit the integrated circuit to providea desired function.

Many of the desired features in VLSI structures may be formed usingphotolithographic methods. Briefly, and in general terms, aphotolithographic mask (or reticle) is formed that includes a desiredpattern corresponding to a particular masking step for the structure.The pattern generally includes optically transparent areas and opticallyattenuating areas that are suitably arranged on an optically transparentsupporting substrate. The mask may then be positioned proximate to anillumination system and a layer of an illumination-sensitive photoresistmaterial applied to a semiconductor wafer. The illumination systemprojects illumination radiation through the optically transmissiveportions of the mask and onto the photoresist material, which suitablychanges the properties of the photoresist material. Subsequentdevelopment of the exposed photoresist material thus permits theselective differentiation between exposed and non-exposed areas in thephotoresist material so that the desired pattern may be subsequentlyformed on the semiconductor wafer.

When a wavelength of the illumination radiation is greater than aminimum feature size expressed on the mask, various optical effects mayadversely affect the quality of features formed on a semiconductorstructure. For example, a mask used to form a memory device array mayinclude patterns having different orientations, such as a first set ofgenerally horizontal features in an array portion of the memory device,and a second set of generally vertical and/or mixed features in aperipheral logic region. Although the illumination system may permit thefirst set of features to be accurately resolved at a first focaldistance, undesired optical aberrations (including, for example,astigmatism) in the illumination system generally permit the second setof resolvable features to be accurately resolved only at a second focaldistance that is different from the first focal distance. In onecommonly employed method, a focal distance is selected for theillumination system that is intermediate between the first focaldistance and the second focal distance so that the first set and thesecond set of features are projected from the mask and onto the wafer toyield a device pattern on the wafer having a correspondinglyintermediate pattern resolution. As device features continue to decreasein size, however, the foregoing optical compensation method may beunable to generate device patterns at an acceptable resolution level.

Therefore, there presently exists an urgent need in the art for opticalcompensation methods, systems, and devices applicable to sub-resolutionphotolithography that permit aggressive reductions in device featuresize.

BRIEF DESCRIPTION OF THE DRAWINGS

Various embodiments of the invention are described in detail below withreference to the following drawings.

FIG. 1 is a diagrammatic block view of a photolithography systemaccording to the various embodiments.

FIG. 2 is a partial plan view of an imaging mask according to thevarious embodiments.

FIG. 3 is a partial cross-sectional view of the imaging mask along thecross section 3-3 indicated in FIG. 2.

FIG. 4 is a partial cross-sectional view of an imaging mask according tothe various embodiments.

FIG. 5 is a partial cross-sectional view of another imaging maskaccording to the various embodiments.

FIG. 6 is a partial cross-sectional view of still another imaging maskaccording to the various embodiments.

FIG. 7 is a partial cross-sectional view of still yet another imagingmask according to the various embodiments.

FIG. 8 is a partial cross-sectional view of an imaging mask according tothe various embodiments.

FIG. 9 is a partial cross-sectional view of an imaging mask according tothe various embodiments.

FIG. 10 is a diagrammatic block view of a mask exposure system,according to the various embodiments.

FIG. 11 is a flowchart illustrating a method of manufacturing an imagingmask, according to the various embodiments.

FIG. 12 is a flowchart illustrating a photolithographic method,according to the various embodiments.

DETAILED DESCRIPTION

Various embodiments of the invention include photolithographic devicesand systems having optical compensation devices for photolithographicmasks used in photolithography, and methods of forming and using suchoptical compensation devices. Specific details of several embodiments ofthe invention are set forth in the following description and in FIGS. 1through 12 to provide a thorough understanding of such embodiments. Oneof ordinary skill in the art, however, will understand that additionalembodiments are possible, and that many embodiments may be practicedwithout several of the details described in the following description.

FIG. 1 is a diagrammatic block view of a photolithography system 10,according to the various embodiments. The system 10 includes anillumination system 12 that is configured to emit illumination radiation14 that may be used for photolithographic imaging. Accordingly, thesystem 10 may include illumination sources (not shown) that are operableto generate radiation 14 in the deep ultraviolet (DUV) portion of thespectrum, such as an excimer laser. Suitable excimer laser sources mayinclude a xenon-fluoride (XeF) device that emits radiation at awavelength of 351 nanometers (nm), a xenon-chloride (XeCl) device thatemits radiation at a wavelength of 308 nm, a krypton-fluoride (KrF)device that emits radiation at a wavelength of 248 nanometers (nm), andan argon-fluoride (ArF) that emits radiation at a 193 nm wavelength.Other suitable illumination sources may include mercury-arc sources thatemit at wavelengths of about 365 nm to 257 nm, depending on the spectralline selected. In addition to the foregoing wavelengths, still otherwavelengths may also be used.

The illumination system 12 may also include devices that provideoff-axis illumination corresponding to a selected illumination mode. Forexample, suitable devices may be configured to generate a dipole-typeillumination mode, an annular illumination mode, a two-pole illuminationmode, a four pole illumination mode, or still other illumination modes.The illumination system 12 may also include other optical devices thatare operable to produce illumination radiation 14 having a desiredintensity and/or distribution.

The illumination system 12 may be positioned relative to an imaging mask16, so that the illumination radiation 14 emitted from the system 12 isprojected onto the imaging mask 16. The imaging illumination 18corresponds to the radiation 14 that is selectively transmitted by theimaging mask 16. The imaging mask 16 may include an opticallytransmissive substrate material, such as a fused quartz substrate,although other suitable materials, such as soda-lime glass andborosilicate glass may also be used.

The imaging mask 16 may also include optical attenuation areas formedfrom various compounds that may include selected combinations ofchromium, oxygen and nitrogen. Alternatively, the optical attenuationareas may also include selected combinations of molybdenum, silicon,oxygen and nitrogen. Other suitable materials are known in the art,which may also be used to form the optical attenuation areas on theoptically transmissive substrate material. The mask 16 may also includeoptical compensation regions according to the various embodiments, aswill be discussed in greater detail below.

The system 10 may further include a projection lens assembly 20 that isconfigured to collect the imaging illumination 18 and form focusedimaging illumination 21 therefrom. The focused imaging illumination 21may then be directed onto an in-process semiconductor structure 22. Thestructure 22 may include a photoresist layer 24 that is responsive tothe illumination 21, which is applied to a surface of a semiconductorwafer 26. Since the photoresist layer 24 may be repetitively exposed tothe focused imaging illumination 21 to form separately exposed areas onthe wafer 26, the semiconductor structure 22 may be positioned upon astage 28 that may be translated in one or more of several (e.g., three)mutually-orthogonal directions.

FIG. 2 is a partial plan view of an imaging mask 30 according to thevarious embodiments. The imaging mask 30 may include a substantiallyplane-parallel and optically transmissive substrate 32 that may furtherinclude one or more patterned regions disposed on a surface of thesubstrate 32 that correspond to functional features of a desiredmicroelectronic device. Accordingly, the patterned regions generallyinclude a plurality of optically transmissive areas interspersed withoptical attenuation areas. The optical attenuation areas may thereforeinclude a radiation-absorbing layer deposited on the substrate 32 thatis comprised of chromium and/or tantalum. Alternately, a metal silicidelayer may be deposited on the substrate 32 to form the opticalattenuation areas. One suitable metal silicide is molybdenum silicide,although others may also be used. In either case, the opticalattenuation areas provide a predetermined reflectance to incidentillumination radiation 14 (as shown in FIG. 1). Other layers may also bepresent on the substrate 32, such as a backside coating that protects anopposing side of the substrate 32 from damage resulting from contactwith the stage 28 (as also shown in FIG. 1), and a resist layer toassist in the formation of the optical attenuation areas on thesubstrate 32. One suitable substrate 32 is the Full Extreme UltravioletLithography (EUV) mask blank, which may be obtained from Schott LithotecUSA of Poughkeepsie, N.Y., although other suitable alternatives exist.

The imaging mask 30 also includes at least a first patterned region 34and a second patterned region 36 that may be spaced apart from the firstpatterned region 34, although the first patterned region 34 and thesecond patterned region 36 may also be at least partially abutting. Thefirst patterned region 34 may also include first features 38 that aregenerally oriented in a first direction, while the second patternedregion 36 may include second features 40 that are generally oriented ina second direction. Although FIG. 2 shows the first features 38 of thefirst patterned region 34 and the second features 40 of the secondpatterned region 36 being approximately mutually perpendicular, it isunderstood that the first features 38 and the second features 40 may beoriented at any relative angular orientation, including substantiallyparallel.

The imaging mask 30 may also include a first optical compensation region42 that is positioned proximate to the first patterned region 34, and asecond optical compensation region 44 that is positioned proximate tothe second patterned region 36. Although FIG. 2 shows the first opticalcompensation region 42 and the second optical compensation region 44positioned proximate to respective first patterned region 34 and secondpatterned region 36, it is understood that one of the first opticalcompensation region 42 and the second optical compensation region 44 maybe omitted in some embodiments. The first optical compensation region 42and the second optical compensation region 44 may be opticallyconfigured to alter a phase of the illumination radiation 14 that isincident on the mask 30. For example, at least one of the first opticalcompensation region 42 and the second optical compensation region 44 maybe configured to provide a phase shift that is greater thanapproximately zero degrees (zero radians), but less than approximately180 degrees (π radians). At least one of the first optical compensationregion 42 and the second optical compensation region 44 may also beconfigured to provide a phase shift that is greater than approximately180 degrees (π radians), but less than approximately 360 degrees (2πradians). In other embodiments, at least one of the first opticalcompensation region 42 and the second optical compensation region 44 maybe configured to shift the phase of the illumination radiation 14(FIG. 1) by approximately about 90 degrees (π/2 radians). The firstoptical compensation region 42 and the second optical compensationregion 44 will be discussed in further detail below.

FIG. 3 is a partial cross-sectional view of the imaging mask 30 alongthe cross section 3-3 indicated in FIG. 2, which will be used to furtherdescribe the first optical compensation region 42 and the second opticalcompensation region 44. The first optical compensation region 42 and thesecond optical compensation region 44 may be incorporated into variousportions of a substrate 32. For example, the first optical compensationregion 42 and the second optical compensation region 44 may bepositioned on a first surface 46 of the substrate 32, and/or on a secondsurface 48 so that an optical path length l₁ in at least one of thefirst optical compensation region 42 and the second optical compensationregion 44 is increased in comparison to an optical path length l₂corresponding to other unaltered portions of the substrate 32. In otherof the various embodiments, at least one of the first opticalcompensation region 42 and the second optical compensation region 44 mayalso include portions that extend inwardly into the substrate 32 to formrecesses projecting into at least one of the first surface 46 and thesecond surface 48, so that the optical path length l₁ is decreased incomparison to the optical path length l₂. In still other of the variousembodiments, at least one of the first optical compensation region 42and the second optical compensation region 44 may be formed byphysically altering a predetermined optical property within thesubstrate 32.

FIG. 4 is a partial cross-sectional view of an imaging mask 50 accordingto the various embodiments. In the discussion that follows, and in theinterest of brevity, only a single optical compensation region will beillustrated and discussed. It is understood, however, that the variousembodiments may include one or more optical compensation regions. Thus,the imaging mask 50 may include at least one optical compensation region52 that projects inwardly into the substrate 32 a distance d₁ from afirst side 54 that opposes a second side 56 that also includes apatterned region 58. Accordingly, an inner optical surface 59 is formedwithin the substrate 32, which may be positioned at a predeterminedposition between the first side 54 and a second side 56 of the substrate32 to provide a negative phase shift relative to a phase of theillumination radiation 14 (see FIG. 1).

In general, a distance d for the optical compensation region 52 may bedetermined using the following expression:

d=2λ/π(n-1)   (1)

where n is the index of refraction for the substrate 32, and λcorresponds to a wavelength of the illumination radiation 14 (as shownin FIG. 1). The inner optical surface 59 may be formed in the substrate32 using either a wet etch or a dry etch method. For example, the inneroptical surface 59 may be formed using a plasma etch process, althoughother suitable methods may also be used.

FIG. 5 is a partial cross-sectional view of another imaging mask 60according to the various embodiments. The imaging mask 60 may include atleast one optical compensation region 62 that projects outwardly fromthe substrate 32 a distance d₂ from a first side 64 that opposes asecond side 66 that also includes a patterned region 68. Accordingly, anouter optical surface 69 is formed on the substrate 32, which may bepositioned at a predetermined position beyond the first side 64 of thesubstrate 32 to provide a positive phase shift relative to a phase ofthe illumination radiation 14 (see FIG. 1). The distance d₂ for theoptical compensation region 62 may be determined using the expression(1) given above. The outer optical surface 64 may be formed usingvarious deposition processes known in the art.

FIG. 6 is a partial cross-sectional view of still another imaging mask70 according to the various embodiments. The imaging mask 70 may includeat least one optical compensation region 72 that projects outwardly fromthe substrate 32 a distance d₃ from a second side 76 that opposes afirst side 74. Accordingly, the optical compensation region 72 may be atleast partially applied on a patterned region 78 to define an outeroptical surface 79 formed on the substrate 32 so that a positive phaseshift relative to a phase of the illumination radiation 14 is provided.The distance d₃ for the optical compensation region 72 may similarly bedetermined using expression (1) above.

FIG. 7 is a partial cross-sectional view of still yet another imagingmask 80 according to the various embodiments. The imaging mask 80 mayalso include at least one optical compensation region 82 that projectsinwardly into the substrate 32 a distance d₄ from a second side 86 thatopposes a first side 84 to define an inner optical surface 89 formedwithin the substrate 32. Accordingly, a negative phase shift relative toa phase of the illumination radiation 14 (see FIG. 1) may be provided. Apatterned region 88 may be applied to the inner optical surface 89. Thedistance d₄ for the optical compensation region 82 may be determined asdescribed above.

FIG. 8 is a partial cross-sectional view of an imaging mask 90 accordingto the various embodiments. The imaging mask 90 may include an opticalcompensation region 92 that projects outwardly from the substrate 32 adistance d₅ from a second side 96 that opposes a first side 94.Accordingly, an outer optical surface 99 may be formed on the substrate32 so that a patterned region 98 may be applied to the outer opticalsurface 99. The distance d₅ may be determined using the expression (1)so that a positive phase shift relative to a phase of the illuminationradiation 14 (see FIG. 1) may be provided.

FIG. 9 is a partial cross-sectional view of an imaging mask 100according to the various embodiments. The imaging mask 100 may includean optical compensation region 102 that is interposed between a firstside 104 and a second side 106 of the substrate 32. Although the mask100 shown in FIG. 9 exhibits a patterned region 108 applied to thesecond side 106, it is understood that the patterned region may bealternately applied to the first side 104. In either case, the opticalcompensation region 102 may include a region having a different opticalproperty than other portions of the substrate 32. Accordingly, theoptical compensation region 102 may have a first optical property, whileother portions of the substrate 32 may have a second optical propertythat is different from the first optical property. For example, theoptical compensation region 102 may have a first transmissibility, whilethe other portions of the substrate 32 may have a secondtransmissibility that is different from the first transmissibility. Theoptical compensation region 102 may also have a first index ofrefraction, while the other portions of the substrate 32 may have asecond index of refraction that is different from the first index ofrefraction.

FIG. 10 is a diagrammatic block view of a mask exposure system 110,according to the various embodiments. The mask exposure system 110 maybe used to fabricate an imaging mask that includes at least one of theoptical compensation regions according to the various embodiments. Thesystem 110 may include an electron beam system 112 that projects anelectron beam 114 towards an imaging mask blank 116 that may have atleast one surface coating 118, such as a photoresist layer.

Although not shown in FIG. 10, the electron beam system 112 may alsoinclude a beam source (such as a thermionic source, or a cold cathodesource), a blanker that is configured to interrupt the beam source, amagnetic beam deflection system and/or an electrostatic deflectionsystem that is configured to steer the electron beam 114 across aselected surface portion of the imaging mask blank 116. Since themagnetic beam deflection system and/or the electrostatic deflectionsystem may be unable to steer the electron beam to all portions of themask blank 116, the blank 116 may be positioned upon a stage 120 thatmay be translated in one or more of several (e.g., three)mutually-orthogonal directions. The system 110 may also include a vacuumchamber 122 that substantially encloses the imaging mask blank 116 andthe stage 120, so that the beam 114 may be directed from the electronbeam system 112 to the mask blank 116.

The system 110 may also include a computer 123, which may include anydevice that is capable of receiving data and programmed instructions,and to process the data according to the received instructions.Accordingly, the computer 123 may include various known devices that mayrange in size and capability between a mainframe device to a portable,or “laptop” device, to a simple industrial controller. The computer 123may be coupled to a mass storage device 124 that may provideinstructions and data to the computer 123. For example, the mass storagedevice 124 may include a disk storage device, although other suitablemass storage devices may also be used. Accordingly, the device 124 maybe used to store patterning instructions, which may be executed by thecomputer 123 to form a desired pattern on the imaging mask blank 116.

Still referring to FIG. 10, the system 110 may include an interface 126coupled to the computer 123 and configured to receive instructions fromthe computer 123. The interface 126 may be configured to translateinstructions received from the computer 123 and convert the receivedinstructions into signals that may be used to control the electron beamsystem 112, and to further control movements of the stage 120.Accordingly, the computer 123 and the interface 126 may cooperativelycontrol scanning of the electron beam 114 across the surface of theimaging mask blank 116. Suitable scanning methods may includeraster-scanning and vector scanning the imaging mask blank 116.

The system 110 is configured to pattern the imaging mask blank 114 byexposing the surface coating 118 to the electron beam 114, and thevacuum chamber 122 may be configured to include other operationsassociated with the fabrication of the imaging mask 16 (as shown in FIG.1), such as etching with an etching apparatus (not shown in FIG. 10)that is operable to selectively etch the substrate 32 in selectedoptical compensation regions (as shown in FIGS. 2-9). A materialdeposition apparatus (not shown) may also be incorporated into thesystem 110, so that a selected material may be deposited onto thesubstrate 32 in the optical compensation region. Alternately, the system110 may be configured to expose the imaging mask blank 116 only, withthe foregoing etching and/or material deposition processes beingperformed at other locations.

FIG. 11 is a flowchart illustrating a method 130 of manufacturing animaging mask, according to the various embodiments. With continuingreference to FIGS. 10 and 11, it can be seen that the method 130includes a block 132, wherein an imaging mask blank 116 is introducedinto the system 110 of FIG. 10. The imaging mask blank 116 may compriseglass having various chemical compositions, such as quartz, or othersimilar materials, and may also include one or more surface layers,including metal and/or silicide layers, such as a molybdenum silicidelayer, as previously described. The one or more surface layers may alsoinclude a suitable photoresist layer.

At block 134, the imaging mask blank 116 is processed to provide adesired pattern of optically transmissive and optical attenuation areason the imaging mask blank 116. Accordingly, processing the imaging maskblank 116 may include exposing a surface of the imaging mask blank 116to an electron beam provided by the mask exposure system 110, anddeveloping exposed photoresist on the imaging mask blank 116 to form adesired pattern of optically transmissive and optical attenuation areasthat functionally correspond to a desired pattern of features on thewafer 26 (as shown in FIG. 1).

At block 136, one or more areas on the processed mask may be selectedfor optical compensation. Typically, the identified or selected areaincludes a plurality of optically transmissive and optical attenuationfeatures, and may further include features that are predominantlyoriented in a predetermined direction, as discussed in detail inconnection with FIG. 2. At block 138, the optical compensation regionmay be formed on the imaging mask blank 116 within the at least one areaidentified at block 136. The optical compensation region, which mayinclude any of the embodiments described in connection with FIGS. 2through 9, may be formed by selectively etching the imaging mask blank116, or by selectively depositing a material onto the imaging mask blank116, or by a predetermined combination of etching and depositionprocesses. Alternately, other operations may be performed that definethe optical compensation region. As previously described, the processesconducted in block 138 may be performed within a vacuum chamber 122 ofthe system 110.

FIG. 12 is a flowchart illustrating a photolithographic method 140,according to the various embodiments. Referring to FIGS. 1 and 12, itcan be seen that at block 142, illuminating radiation 14 is provided toan imaging mask 16 that includes at least one of the opticalcompensation regions shown in FIGS. 2 through 9. The illuminatingradiation 14 may be provided by a DUV source, such as an excimer laser,or it may be provided by other suitable illumination sources. At block144, the at least one optical compensation region in the imaging mask 16is illuminated. Accordingly, phase-adjusted imaging illumination 18 isprojected from the optical compensation region and onto a photoresistlayer 24 of semiconductor wafer 26 to expose the photoresist layer 24.The phase-adjusted imaging illumination 18 may be focused through aprojection lens assembly 20, as previously described. At block 148, theexposed photoresist layer 24 and the wafer 26 are suitably processed togenerate the desired features on the wafer 26.

While the various embodiments of the invention have been illustrated anddescribed, as noted above, many changes can be made without departingfrom the scope of this disclosure. For example, although the foregoingdisclosure of the various embodiments generally recitesphotolithography, or other similar terminology, it is understood thatthe various embodiments may also be used in connection with variousmicrolithographic processes and systems without significantmodification. Accordingly, the various embodiments are not to be limitedto the use of DUV illumination sources, and may include the use of x-rayor electron beam sources, or still other illumination sources. Further,certain foregoing embodiments of the optical compensation regions andimaging masks may be used in the fabrication of a wide variety ofsemiconductor devices, which may include semiconductor memory devices,including in particular, a static memory, a dynamic memory such as adynamic random access memory (DRAM), an extended data out dynamic randomaccess memory (EDO DRAM), a synchronous dynamic random access memory, adouble data rate synchronous dynamic random access memory (DDR SDRAM), asynchronous link dynamic random access memory (SLDRAM), a video randomaccess memory (VRAM), a Rambus® dynamic random access memory (RDRAM), astatic random access memory (SRAM), a flash memory, as well as otherknown memory devices.

The accompanying drawings that form a part hereof show by way ofillustration, and not of limitation, specific embodiments in which thesubject matter may be practiced. The embodiments illustrated aredescribed in sufficient detail to enable those skilled in the art topractice the teachings disclosed herein. Other embodiments may beutilized and derived therefrom, such that structural and logicalsubstitutions and changes may be made without departing from the scopeof this disclosure. This Detailed Description, therefore, is not to betaken in a limiting sense, and the scope of various embodiments isdefined only by the appended claims, along with the full range ofequivalents to which such claims are entitled.

Thus, although specific embodiments have been illustrated and describedherein, it should be appreciated that any arrangement calculated toachieve the same purpose may be substituted for the specific embodimentsshown. This disclosure is intended to cover any and all adaptations orvariations of various embodiments. Combinations of the aboveembodiments, and other embodiments not specifically described herein,will be apparent to those of ordinary skill in the art upon reviewingthe above description.

The Abstract of the Disclosure is provided to comply with 37 C.F.R.§1.72(b), requiring an abstract that will allow the reader to quicklyascertain the nature of the technical disclosure. It is submitted withthe understanding that it will not be used to interpret or limit thescope or meaning of the claims. In addition, in the foregoing DetailedDescription, it can be seen that various features may be groupedtogether in a single embodiment for the purpose of streamlining thedisclosure. This method of disclosure is not to be interpreted asreflecting an intention that the claimed embodiments require morefeatures than are expressly recited in each claim. Rather, as thefollowing claims reflect, inventive subject matter lies in less than allfeatures of a single disclosed embodiment. Thus the following claims arehereby incorporated into the Detailed Description, with each claimstanding on its own as a separate embodiment.

1. A photolithography system, comprising: an imaging mask formed on anoptically transmissive substrate that receives illumination radiationfrom an illumination system, wherein the mask includes at least onepatterned region that has a plurality of optically transmissive andoptical attenuating regions formed on the mask, and at least one opticalcompensation region that comprises a substrate portion, wherein thesubstrate portion extends inwardly or outwardly from a surface of thesubstrate and is positioned in optical coincidence with the at least onepatterned region.
 2. The system of claim 1, wherein the substrateportion is configured to change a phase of the illumination radiationincident on the patterned region by altering an optical property of thesubstrate.
 3. The system of claim 1, wherein the optical compensationregion is configured to change a phase of the illumination radiation byaltering an optical path length of the substrate.
 4. The system of claim1, wherein the optical compensation region comprises a material havingan index of refraction that is different from an index of refraction ofthe substrate.
 5. The system of claim 1, wherein the opticalcompensation region comprises a material having a transmissibility thatis different from a transmissibility of the substrate.
 6. The system ofclaim 1, wherein the substrate comprises a thickness greater than athickness of the optical compensation region.
 7. The system of claim 1,wherein the substrate comprises a thickness less than a thickness of theoptical compensation region.
 8. The system of claim 1, wherein theillumination system comprises a deep ultraviolet source of illuminationradiation.
 9. The system of claim 1, further comprising a projectionlens assembly capable of being positioned between the imaging mask and asemiconductor wafer.
 10. An imaging mask, comprising: an opticallytransmissive substrate; a first patterned region formed on thesubstrate; a second patterned region formed on the substrate that isproximate to the first patterned region, the first patterned region andthe second patterned region each having a plurality of opticallytransmissive and optically attenuating regions formed on the mask; andan optical compensation region that comprises a substrate portion,wherein the substrate portion extends inwardly or outwardly from asurface of the substrate and is positioned to optically coincide with atleast one of the first patterned region and the second patterned region.11. The image mask of claim 10, wherein the substrate portion isconfigured to change a phase of the illumination radiation incident onthe at least one of the first patterned region and the second region byaltering an optical property of the substrate.
 12. The imaging mask ofclaim 10, wherein the optical compensation region comprises an opticalpath length that is different from a thickness of the substrate.
 13. Theimaging mask of claim 10, wherein the optical compensation regioncomprises a material having a first index of refraction that isdifferent from a second index of refraction of the substrate.
 14. Theimaging mask of claim 10, wherein the optical compensation regioncomprises a first transmissibility that is different from a secondtransmissibility of the substrate.
 15. The imaging mask of claim 12,wherein the optically transmissive substrate comprises a substratethickness is greater than a thickness of the optical compensationregion.
 16. The imaging mask of claim 12, wherein the opticallytransmissive substrate comprises a substrate thickness less than athickness of the optical compensation region.
 17. The imaging mask ofclaim 10, wherein the optical compensation region is configured tochange the phase of the incident illumination radiation by a valuegreater than zero degrees relative to the incident illuminationradiation, and less than 180 degrees relative to the incidentillumination radiation.
 18. The imaging mask of claim 10, wherein theoptical compensation region is configured to change the phase of theincident illumination radiation by a value greater than 180 degreesrelative to the incident illumination radiation, and less than 360degrees relative to the incident illumination radiation.
 19. The imagingmask of claim 10, wherein the optical compensation region is configuredto change the phase of the incident illumination radiation by a value ofapproximately 90 degrees relative to the incident illuminationradiation.
 20. An imaging mask, comprising: an optically transmissivesubstrate; a first patterned region formed on the substrate having afirst set of features oriented in a first direction; a second patternedregion formed on the substrate having a second set of features orientedin a second direction that is different from the first direction; afirst optical compensation region comprising a first substrate portionextending inwardly or outwardly from a surface of the substrate andpositioned to optically coincide with the first patterned region; and asecond optical compensation region comprising a second substrate portionextending inwardly or outwardly from the surface of the substrate andpositioned to optically coincide with the second patterned region. 21.The imaging mask of claim 20, wherein the first optical compensationregion and the second optical compensation region are configured tochange a phase of the illumination radiation incident on the firstpatterned region and the second region by altering an optical propertyof the substrate.
 22. The imaging mask of claim 20, wherein the firstdirection is approximately perpendicular to the second direction. 23.The imaging mask of claim 20, wherein the first patterned region and thesecond patterned region are at least partially abutting.
 24. The imagingmask of claim 20, wherein the optically transmissive substrate comprisesa substrate thickness greater than a thickness of a selected one of thefirst optical compensation region and the second optical compensationregion.
 25. The imaging mask of claim 20, wherein the opticallytransmissive substrate comprises a substrate thickness less than athickness of a selected one of the first optical compensation region andthe second optical compensation region.
 26. The imaging mask of claim20, wherein the first patterned region and the second patterned regionare formed on a first side of the substrate, and wherein the firstoptical compensation region and the second optical compensation regionare formed on a second opposing side of the substrate.
 27. The imagingmask of claim 20, wherein the first patterned region and the secondpatterned region are formed on a first side of the substrate, andwherein the first optical compensation region is formed on the firstside of the substrate and the second optical compensation region isformed on a second opposing side of the substrate.
 28. The imaging maskof claim 20, wherein at least one of the first optical compensationregion and the second optical compensation region comprises a materialhaving an index of refraction that is different from an index ofrefraction of the substrate.
 29. The imaging mask of claim 20, whereinat least one of the first optical compensation region and the secondoptical compensation region comprises a material having an index ofrefraction that is different from an index of refraction of a materialcomprising the substrate.
 30. The imaging mask of claim 20, wherein atleast one of the first optical compensation region and the secondoptical compensation region comprises a material having atransmissibility that is different from a transmissibility of a materialcomprising the substrate.
 31. A photolithographic method, comprising:providing illumination radiation to an imaging mask having an opticallytransmissive substrate; illuminating at least one optical compensationregion on the imaging mask, wherein the optical compensation region ispositioned in optical coincidence with a patterned region on the maskhaving a plurality of optically transmissive and optically attenuatingfeatures, the optical compensation region comprising a substrate portionthat extends inwardly or outwardly from a surface of the substrate; andprojecting phase-shifted illumination radiation from the opticalcompensation region onto a photoresist layer on a semiconductor wafer.32. The method of claim 31, further comprising processing thesemiconductor wafer to form structures on the semiconductor wafercorresponding to the features.
 33. The method of claim 31, furthercomprising changing a phase of the provided illumination radiation usingan altered optical property of the substrate
 34. The method of claim 31,wherein providing illumination radiation comprises providing deepultraviolet radiation to the imaging mask.
 35. The method of claim 31,wherein illuminating at least one optical compensation region on theimaging mask comprises projecting the illumination through the opticalcompensation region and changing a phase of the illumination radiationby altering an optical path length in the imaging mask.
 36. The methodof claim 31, wherein illuminating at least one optical compensationregion on the imaging mask comprises projecting the illumination throughan optical compensation region having an index of refraction thatdiffers from an index of refraction of a substrate of the imaging mask.37. The method of claim 31, wherein illuminating at least one opticalcompensation region on the imaging mask comprises projecting theillumination through an optical compensation region that includes atransmissibility that is different from a transmissibility of asubstrate of the imaging mask.